Dr. Evgenii Borisovich Gorokhov Profile

Dr. Evgenii Borisovich Gorokhov

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Proceedings Article | 8 February 2011 Paper

Laser treatment of the heterolayers GeO2:Ge-QDs

E. Gorokhov, V. Volodin, A. Kuznetsov, B. Chichkov, K. Astankova, I. Azarov

Proceedings Volume 7994, 79940W (2011) https://doi.org/10.1117/12.882043

KEYWORDS: Germanium, Laser ablation, Pulsed laser operation, Crystals, Silica, Femtosecond phenomena, Raman spectroscopy, Absorption, Solids, Multilayers

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Treatments by femtosecond Ti-sapphire laser (wavelength is 800 nm, pulse duration is <30 fs) and nanosecond KrF excimer laser (wavelength is 248 nm, pulse duration is 25 ns) were performed to study the impact of laser fluence, pulse duration and energy of photons on the process of chemical and structural reconstructions in GeO_x and GeO₂:Ge heterolayers. The solid GeO_x films are metastable and decompose into two phases - Ge and GeO₂. Nanosecond KrF laser irradiation produces significant shrinkage of GeO_x films and GeO₂:Ge heterolayers caped by thin SiN_xO_y or SiO₂ films. Pulse annealing by both types of lasers stimulate as the process of nanoclusters forming and crystallization of initial amorphous Ge-nanoclusters in the GeO₂ matrix. The possibility to use the solid germanium monoxide (GeO(s)) and GeO₂:Ge heterolayers (without cap layers) as nano-resist in laser nanolithography was demonstrated. The new nanostructured material was formed - the layers of nanofoam GeO₂ which can be obtained only with application of femtosecond laser pulse treatments.

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