Dr. Fedor V. Grigoriev Profile

Dr. Fedor V. Grigoriev

at MV Lomonosov Moscow State Univ

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 5 June 2018 Paper

High performance atomistic simulation of thin films porosity and surface structure

F. Grigoriev, V. Sulimov, A. Tikhonravov

Proceedings Volume 10691, 1069109 (2018) https://doi.org/10.1117/12.2312707

KEYWORDS: Chemical species, Thin films, Silicon, Monte Carlo methods, Silica, Surface roughness, Algorithm development, Spherical lenses, Computer simulations, Device simulation

Read Abstract +

Proceedings Article | 1 December 2017 Paper

Thin films structural properties: results of the full-atomistic supercomputer simulation

F. Grigoriev, V. Sulimov, A. Tikhonravov

Proceedings Volume 10603, 106030F (2017) https://doi.org/10.1117/12.2292420

KEYWORDS: Silica, Thin films, Thin film growth, Deposition processes

Read Abstract +

Proceedings Article | 23 September 2015 Paper

Supercomputer modeling of the ion beam sputtering process: full-atomistic level

F. Grigoriev, A. Sulimov, I. Kochikov, O. Kondakova, V. Sulimov, A. Tikhonravov

Proceedings Volume 9627, 962708 (2015) https://doi.org/10.1117/12.2190938

KEYWORDS: Chemical species, Silica, Silicon, Glasses, Systems modeling, Deposition processes, Thin films, Sputter deposition, Crystals, Ion beams

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years