Dr. Fernando A. Sigoli
R&D Manager at OptiNetrics Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 28 May 2004 Paper
Edgar Mendoza, Fernando Sigoli, Heidi Paulus, Luan Giang, Mahmood Seifouri, E. Lam, Lothar Kempen
Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.527581
KEYWORDS: Photomasks, Photomask technology, Deep ultraviolet, Lithography, Ultraviolet radiation, Computer generated holography, Signal attenuation, Glasses, Thin films, Silica

Proceedings Article | 17 December 2003 Paper
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.528092
KEYWORDS: Photomasks, Photomask technology, Deep ultraviolet, Lithography, Ultraviolet radiation, Computer generated holography, Signal attenuation, Glasses, Thin films, Optical lithography

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