Mr. Frank T. Hartley Profile

Frank T. Hartley

Sr. Technical Staff at Jet Propulsion Lab

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Author

Publications (9)

Proceedings Article | 3 November 2003 Paper

Grating fabrication through x-ray lithography

Pantazis Mouroulis, Frank Hartley, Richard Muller, Daniel Wilson, Aidan Shori, Martin Feldman, Li Jiang, Todd Christenson

Proceedings Volume 5173, 51730D (2003) https://doi.org/10.1117/12.503200

KEYWORDS: Photomasks, Wavefronts, X-ray lithography, Fabrication, X-rays, Coating, Diffraction gratings, Mask making, Spectrometer engineering, Holography

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Proceedings Article | 13 November 2002 Paper

A nanoscale soft-ionization membrane: a novel ionizer for ion mobility spectrometers for space applications

Frank Hartley, Isik Kanik

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.484271

KEYWORDS: Ions, Ionization, Molecules, Spectrometers, Mars, Carbon monoxide, Chemical analysis, Mass spectrometry, Statistical analysis, Spectroscopy

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Proceedings Article | 1 September 2000 Paper

Focused ion beam direct micromachining of DOEs

Chantal Khan Malek, Frank Hartley, Jayant Neogi

Proceedings Volume 4075, (2000) https://doi.org/10.1117/12.397932

KEYWORDS: Ion beams, Micromachining, Lithography, Etching, Optics manufacturing, X-ray lithography, Optical components, Ions, Zone plates, Gold

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Proceedings Article | 21 July 2000 Paper

Maskless 3D micromachining with focused ion beam of high-resolution diffractive optics

Chantal Khan Malek, Frank Hartley, Jayant Neogi

Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390040

KEYWORDS: Ion beams, Electron beam lithography, Zone plates, Lithography, Etching, Gold, Micromachining, Iodine, X-rays, Metals

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Proceedings Article | 8 October 1999 Paper

Nanometer x-ray lithography

Frank Hartley, Chantal Khan Malek

Proceedings Volume 3893, (1999) https://doi.org/10.1117/12.368464

KEYWORDS: X-rays, Photomasks, X-ray lithography, Printing, Lithography, Optical lithography, Photoresist materials, Ultraviolet radiation, Gold, Ion beams

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Proceedings Article | 29 September 1999 Paper

Micropump technology and applications

Frank Hartley

Proceedings Volume 3891, (1999) https://doi.org/10.1117/12.364470

KEYWORDS: Space operations, Microfluidics, Metals, Semiconducting wafers, Silicon, Microelectromechanical systems, Dielectrics, Spectroscopy, Wafer bonding, Electronics

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Proceedings Article | 29 September 1999 Paper

Development and terrestrial applications of a nano-g accelerometer

Frank Hartley

Proceedings Volume 3891, (1999) https://doi.org/10.1117/12.364471

KEYWORDS: Optical filters, Metals, Mirrors, Calibration, Imaging systems, Semiconducting wafers, Actuators, Fabry–Perot interferometers, Tunable filters, Spectrometers

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Proceedings Article | 5 June 1998 Paper

X-ray exposures of electrodeposited photoresist for conformal lithography on corrugated surfaces

Frank Hartley, Chantal Khan Malek, Steven Nguyen

Proceedings Volume 3331, (1998) https://doi.org/10.1117/12.309615

KEYWORDS: X-ray lithography, X-rays, Photoresist materials, Photomasks, Copper, Lithography, Ultraviolet radiation, Optical lithography, Reflection, Thin films

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Proceedings Article | 19 September 1995 Paper

Tunneling tip protection for a bulk micromachined accelerometer

Paul Zavracky, Bob McClelland, Jianchao Wang, Frank Hartley

Proceedings Volume 2639, (1995) https://doi.org/10.1117/12.221289

KEYWORDS: Semiconducting wafers, Sensors, Silicon, Capacitance, Metals, Etching, Epoxies, Spindles, Scanning tunneling microscopy, Electrodes

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Showing 5 of 9 publications

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