Mr. Gary Dean Gray Profile

Gary Dean Gray

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Publications (1)

Proceedings Article | 16 January 2003 Paper

Electrostatic actuators and tunable micro capacitors/switches with expanded tuning range due to intrinsic stress gradients

Gary Gray, Matthew Morgan, Paul Kohl

Proceedings Volume 4981, (2003) https://doi.org/10.1117/12.478172

KEYWORDS: Gold, Electrodes, Actuators, Beam shaping, Instrument modeling, Microelectromechanical systems, Capacitors, Capacitance, Dielectrics, Distance measurement

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