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Ghislain Troussier
at LAAS-CNRS
SPIE Involvement:
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Publications (1)
Proceedings Article | 30 December 2003 Paper
Fabrication of integrated inductors on silicon for fully integrated DC-DC microconverters
Ghislain Troussier, Jean-Pierre Laur, Jean-Louis Sanchez, David Bourrier, Veronique Conedera, Monique Dilhan, Norbert Fabre, Yves Lembeye, Herve Morel, Bruno Cogitore
Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.531969
KEYWORDS: Magnetism, Copper, Photoresist materials, Electroplating, Photoresist processing, Silicon, Optical lithography, Metals, Manufacturing, CMOS technology
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