Mr. Giorgio Longoni Profile

Giorgio Longoni

at SAES Getters SpA

SPIE Involvement:

Author

Publications (2)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 6 January 2006 Paper

High and stable Q-factor in resonant MEMS with getter film

A. Conte, M. Moraja, G. Longoni, A. Fourrier

Proceedings Volume 6111, 61110N (2006) https://doi.org/10.1117/12.647710

KEYWORDS: Sensors, Microelectromechanical systems, Semiconducting wafers, Gases, Thin films, Silicon, Packaging, Infrared sensors, Carbon monoxide, Sensor performance

Read Abstract +

The need to reach high and stable values of the Q-factor is one of the most important issues of resonant MEMS in order to make high-performance sensors. The Q-factor is strongly influenced by the internal environment of the MEMS packaging, by total pressure and by gas composition. The most experienced and technically accepted way to keep the atmosphere stable in a hermetically sealed device is to use a getter material that is able to chemically absorb active gases under vacuum or in inert gas atmosphere for the lifetime of the devices. MEMS hermetically bonded devices such as gyroscopes, accelerometers, pressure and flow sensors, IR sensors, RF-MEMS and optical mirrors requires getter thin film solutions to work properly. Getter technical solution for wafer to wafer hermetically bonded MEMS systems is PaGeWafer, a silicon, glass or ceramic wafer ("cap wafer") with patterned getter film, few microns thick. In this paper, first the theoretical evaluation of Q-factor of a MEMS resonant structure in presence of a getter film is investigated and compared to the results of a Residual Gas Analysis of the same MEMS resonant structure and with the conventional measurement of Q-factor. Using getter thin film technology, total pressures down to 10^-4 mbar with corresponding high and stable Q-factors have been achieved in MEMS resonant structures. We were therefore able to confirm that getter films can provide high Q-values, stability of sensor signal, performances stability during the lifetime, removal of dangerous gases like H₂ and H₂O in hermetically sealed MEMS resonant structures.

Proceedings Article | 29 July 2005 Paper

Alkali metal sources for OLED devices

Lorena Cattaneo, Giorgio Longoni, Antonio Bonucci, Stefano Tominetti

Proceedings Volume 5961, 59610A (2005) https://doi.org/10.1117/12.634736

KEYWORDS: Alkali metals, Lithium, Organic light emitting diodes, Cesium, Metals, Doping, Laser induced fluorescence, Aluminum, External quantum efficiency, Electron transport

Read Abstract +

In OLED organic layers electron injection is improved by using alkali metals as cathodes, to lower work function or, as dopants of organic layer at cathode interface. The creation of an alkali metal layer can be accomplished through conventional physical vapor deposition from a heated dispenser. However alkali metals are very reactive and must be handled in inert atmosphere all through the entire process. If a contamination takes place, it reduces the lithium deposition rate and also the lithium total yield in a not controlled way. An innovative alkali metal dispensing technology has been developed to overcome these problems and ensure OLED alkali metal cathode reliability. The alkali Metal dispenser, called Alkamax, will be able to release up to a few grams of alkali metals (in particular Li and Cs) throughout the adoption of a very stable form of the alkali metal. Lithium, for example, can be evaporated “on demand”: the evaporation could be stopped and re-activated without losing alkali metal yield because the metal not yet consumed remains in its stable form. A full characterization of dispensing material, dispenser configuration and dispensing process has been carried out in order to optimize the evaporation and deposition dynamics of alkali metals layers. The study has been performed applying also inside developed simulations tools.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years