Hai-Joong Park
at Inha Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 11 February 2009 Paper
Proceedings Volume 7219, 72190X (2009) https://doi.org/10.1117/12.811958
KEYWORDS: Lithography, Wet etching, Waveguides, Optical lithography, Silica, Photoresist materials, Cladding, Etching, Ultraviolet radiation, Refractive index

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