Heike Müller
at Leibniz Institute of Surface Engineering (IOM)
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 5 September 2023 Paper
Heike Müller, Thomas Arnold
Proceedings Volume 12755, 1275504 (2023) https://doi.org/10.1117/12.2675793
KEYWORDS: Temperature metrology, Infrared cameras, Polishing, Optical surfaces, Surface finishing, Plasma

Proceedings Article | 15 July 2022 Paper
Heike Müller, Thomas Arnold
Proceedings Volume 12298, 1229806 (2022) https://doi.org/10.1117/12.2631860
KEYWORDS: Temperature metrology, Glasses, Plasma, Atmospheric plasma, Polishing, Surface finishing, Optics manufacturing

Proceedings Article | 7 June 2021 Paper
Heike Müller, Georg Böhm, Thomas Arnold
Proceedings Volume 11853, 1185303 (2021) https://doi.org/10.1117/12.2593591

Proceedings Article | 28 June 2019 Paper
Heike Müller, Georg Böhm, Thomas Arnold
Proceedings Volume 11171, 111710A (2019) https://doi.org/10.1117/12.2526746
KEYWORDS: Plasma, Silicon, Etching, Atmospheric plasma, Spatial frequencies, Calibration, Manufacturing, Plasma etching

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