Dr. Hiroki Sato Profile

Dr. Hiroki Sato

at Tohoku Univ

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 7 March 2008 Paper

Fluoride single crystals for the next generation lithography

Teruhiko Nawata, Yoji Inui, Toshiro Mabuchi, Naoto Mochizuki, Isao Masada, Eiichi Nishijima, Hiroki Sato, Tsuguo Fukuda

Proceedings Volume 6924, 69242L (2008) https://doi.org/10.1117/12.771786

KEYWORDS: Crystals, Transmittance, Magnesium fluoride, Refractive index, Vacuum ultraviolet, Laser crystals, Lithography, Immersion lithography, Transparency, Crystallography

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Proceedings Article | 27 March 2007 Paper

High-index fluoride materials for 193-nm immersion lithography

Teruhiko Nawata, Yoji Inui, Isao Masada, Eiichi Nishijima, Toshiro Mabuchi, Naoto Mochizuki, Hiroki Satoh, Tsuguo Fukuda

Proceedings Volume 6520, 65201P (2007) https://doi.org/10.1117/12.711045

KEYWORDS: Crystals, Transmittance, Laser induced fluorescence, Annealing, Refractive index, Immersion lithography, Transparency, Vacuum ultraviolet, Scattering, Excimer lasers

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Proceedings Article | 15 March 2006 Paper

High index fluoride materials for 193 nm immersion lithography

T. Nawata, Y. Inui, I. Masada, E. Nishijima, H. Satoh, T. Fukuda

Proceedings Volume 6154, 61541A (2006) https://doi.org/10.1117/12.657247

KEYWORDS: Crystals, Refractive index, Fluorine, Vacuum ultraviolet, Immersion lithography, Metals, Laser induced fluorescence, Transmittance, Birefringence, Transparency

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Proceedings Article | 7 June 2005 Paper

Development of UV solid state laser sources based on cerium activated crystals

Daniele Alderighi, Guido Toci, Matteo Vannini, Marina Mazzoni, Mauro Tonelli, Daniela Parisi, Hiroki Sato, Martin Niklc

Proceedings Volume 5850, (2005) https://doi.org/10.1117/12.633723

KEYWORDS: Solid state lasers, Crystals, Laser crystals, Nd:YAG lasers, Pulsed laser operation, Nonlinear crystals, Oscillators, Ultraviolet radiation, Mirrors, Prisms

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Proceedings Article | 8 October 2004 Paper

F2-laser-induced damage on transparent fluoride crystals

Yoshizo Kawaguchi, Aiko Narazaki, Tadatake Sato, Ryozo Kurosaki, Hiroyuki Niino, Hiroki Sato, Tomohiko Satonaga, Tsuguo Fukuda

Proceedings Volume 5662, (2004) https://doi.org/10.1117/12.596411

KEYWORDS: Crystals, Vacuum ultraviolet, Transmittance, Laser irradiation, Laser crystals, Fluorine, Laser ablation, Lenses, Reflection, Refractive index

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