Dr. Hongbo Li Profile

Dr. Hongbo Li

at Harbin Institute of Technology

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Publications (2)

Proceedings Article | 24 March 2006 Paper

Spatial analysis of line-edge roughness through scaling and fractal concepts using AFM techniques

Ning Li, Xuezeng Zhao, Weijie Wang, Hongbo Li

Proceedings Volume 6152, 615246 (2006) https://doi.org/10.1117/12.656000

KEYWORDS: Line edge roughness, Fractal analysis, Edge roughness, Atomic force microscopy, Image analysis, Edge detection, Spatial frequencies, Semiconductors, Spatial analysis, Correlation function

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Proceedings Article | 23 February 2006 Paper

Application of cellular neural networks in the measurement of line-width and line edge roughness

Hong-bo Li, Xue-zheng Zhao, Wei Chu, Ning Li

Proceedings Volume 6150, 61504S (2006) https://doi.org/10.1117/12.676727

KEYWORDS: Line edge roughness, Line width roughness, Neural networks, Atomic force microscopy, Edge detection, Image processing, Lithium, Data processing, Edge roughness, Binary data

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