Dr. Huahuang Luo
at Hong Kong Univ. of Science and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 17 March 2023 Presentation
Proceedings Volume 12434, 124340I (2023) https://doi.org/10.1117/12.2651330
KEYWORDS: Scanners, 3D modeling, Finite element methods, Etching, Capacitance, Actuators, Reactive ion etching, Oxides, Mirrors, Silicon

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