In chip-integrated optical circuits, the polarization beam splitter (PBS) is one of the core elements that separates TE/TM modes and transmits them to different ports. We designed an ultracompact Si-based PBS with a footprint of 2 μm × 2 μm by an intelligent inverse design method. This method combines the method of moving asymptotes algorithm and the finite element method, and it has a high polarization extinction ratio (PER) and large splitting bandwidth from 850 to 1450 nm. The transmission of the TE and TM modes reaches 93% and 73%, respectively, and the average PER is 21 and 20 dB, respectively. Moreover, we developed other PBSs with different materials and different directional output ports that have wonderful splitting performance in different wavebands.
An ultra-compact Si-based beam splitter (BS) with footprint of 1 μm × 2 μm has been reported. It can split beams fifty–fifty with a 180-deg separation angle, and it is suit for integrated on a chip. It achieves high efficiency of 94.6% and 93.1% at wavelengths 1310 and 1550 nm, respectively, and more than 91% from 950 to 1600 nm. If Si is replaced with GaN or SiC in this device, it also can split the beam with high efficiency. Based on this, by means of replacing substrate material, different kinds of BSs for suitable wavebands can be fabricated in the same pipeline without changing mask template. This device has been designed by an intelligent method, which combines the method of moving asymptotes and the finite-element method, and GaN-based and SiO2-based BSs have been designed by this method for near-infrared and visible light, respectively.
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