Using artificial materials such as electromagnetic bandgap structures can be one of the promising ways to improve the efficiency of compact miniaturized vacuum electronic devices such as millimeter-band traveling-wave tubes with 2D planar microstrip slow-wave structures on dielectric substrates. Precision micromachining of the microsized elements of the electromagnetic bandgap structures is challenging. Here we proposed and studied an approach for microfabrication of the electromagnetic bandgap structure with microsized patterns by pulsed laser ablation. The obtained results of the morphology studies by scanning electron microscopy and optical microscopy show that the proposed approach allows fabricating of the microsized pattern with suitable tolerance. Also, we showed several results of numerical simulations of the electromagnetic parameters of the meander-line slow-wave structure on a dielectric substrate with an incorporated electromagnetic bandgap structure.
Flexible electronics attract great interest due to their wide opportunities for practical application in the field of wireless communication, personalized medicine, security, etc. Flexible wireless technologies require low profile, lightweight, and compact antennas. In this work, an antenna on a flexible dielectric substrate for the ISM range and 2G/3G/4G standards of cellular bands was designed and numerically studied. Also, we plan to fabricate the designed antenna with the help of our original technological approach based on the magnetron sputtering and nanosecond laser ablation. Several preliminary results of microfabrication opportunities with the help of the mentioned above approach are shown.
Scalable and cost-effective microfabrication approaches are highly demanded for manufacturing of RF and millimeterwave circuits such as transmission structures for flexible electronic devices. Flexible electronics play a key role in wearable and wireless technologies applicable in personalized medicine, sensing, energy harvesting, and communication areas. Here we report the results of thin copper films patterns micromachining using nanosecond-pulsed laser on flexible dielectric substrates. Thin copper films were deposited by magnetron sputtering onto 100 μm thick polyimide films that were used as dielectric substrates. Then, patterns were created through film ablation using a CNC laser micromachining system with a 1064 nm ytterbium 8 ns pulse duration fiber laser to chisel away the superfluous material just as it have been done in sculputure for ages. Several regimes of laser micromachining were studied. The most important issue in the laser micromachining of the metal films on the flexible dielectric substrate is flexible substrate thermal damage due to overheating. Optimal regimes of laser micromachining were found that allow to prevent this. These regimes will be used in the future to fabricate flexible transmission lines for RF and millimeter-wave signals. The schematic and design of the transmission line are considered. Results of numerical simulations made by ANSYS HFSS are presented.
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