Dr. Jana Clerico Profile

Dr. Jana Clerico

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Publications (2)

Proceedings Article | 10 May 2005 Paper

Automatic classification of microlithography macrodefects using a knowledge-based system

Michael Darwin, Pinar Kinikoglu, Yongqiang Liu, Kristin Darwin, Jana Clerico

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599660

KEYWORDS: Semiconducting wafers, Inspection, Image processing, Lithography, Image classification, Manufacturing, Classification systems, Optical lithography, Particles, Thin film coatings

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Proceedings Article | 24 May 2004 Paper

Characterizing SiOx Ny ARC materials with laser ellipsometry and DUV reflectometry

Gary Jiang, Timothy Sun, Donald Pelcher, Jana Clerico, Jui-Ping Li, Yi-Ru Chen

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.535264

KEYWORDS: Etching, Metrology, Reflectivity, Deep ultraviolet, Reflectometry, Transmission electron microscopy, Semiconducting wafers, Ellipsometry, Process control, Silicon

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