An empirical method for Canny filter optimization is explored and applied to the problem of measuring rigid motion
between targets for nanometer motion detection. Operating with an image space pixel size of 3 μm, we are able to
obtain static target localization to 6 nm at 2σ variation. To discriminate target roughness from sub-pixel measurement
noise we use a Laplacian filter method. To extend the resolution beyond the limits of a single sub-pixel sample we use
multiple adjacent edge locations along a single target to statistically reduce the overall resolution. With sufficient
samples we obtain near .001 pixels resolving power. Even at this resolution we have not reached the limits of sampling
which are possible from simultaneously sampling sets of parallel lines allowing for future refinement of method to
localize well below .001 pixels.
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