Mr. Jeffrey A. Reed Profile

Jeffrey A. Reed

at Univ of Texas at Dallas

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Author

Publications (1)

SPIE Journal Paper | 1 January 2002

Linearized inversion of scatterometric data to obtain surface profile information

Emmanuel Drege, Jeffrey Reed, Dale Byrne

OE, Vol. 41, Issue 01, (January 2002) https://doi.org/10.1117/12.10.1117/1.1416850

KEYWORDS: Reflectivity, Polarization, Diffraction, Optical design, Optical engineering, Structural design, Lithography, Computer simulations, Semiconducting wafers, Diffraction gratings

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