Mr. Wei Zhang Profile

Wei Zhang

at CIOMP

SPIE Involvement:

Author

Publications (3)

SPIE Journal Paper | 21 September 2015

Calibrating the pupil fill balance for hypernumerical aperture lithographic objective

Dawei Rui, Wei Zhang, Huaijiang Yang

OE, Vol. 54, Issue 09, 095103, (September 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.9.095103

KEYWORDS: Objectives, Calibration, Lithography, Semiconducting wafers, Photomasks, Code v, Monte Carlo methods, Optical engineering, Ray tracing, Lithographic illumination

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Proceedings Article | 19 September 2013 Paper

850nm vertical cavity surface emitting lasers utilizing the self-planar mesa structure

Jianwei Zhang, Yongqiang Ning, Xing Zhang, Jian Zhang, Lijun Wang

Proceedings Volume 8905, 89050E (2013) https://doi.org/10.1117/12.2032237

KEYWORDS: Vertical cavity surface emitting lasers, Oxides, Resistance, Heat flux, Internal quantum efficiency, Thermal effects, Temperature metrology, Thermal analysis, Quantum wells, Oxidation

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Proceedings Article | 17 September 2013 Paper

Power scaling and beam divergence compression of bottom-emitting vertical-cavity surface-emitting lasers

Xing Zhang, Yongqiang Ning, Jianwei Zhang, Jian Zhang, Jinsheng Zhang, Peng Jia, Xiushan Li, Jingjing Shi, Li Qin, Yun Liu, Cunzhu Tong, Lijun Wang

Proceedings Volume 8904, 89040D (2013) https://doi.org/10.1117/12.2032046

KEYWORDS: Vertical cavity surface emitting lasers, Reflectivity, Oxides, Quantum wells, Continuous wave operation, Thermal effects, Finite element methods, Absorption, Semiconducting wafers

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