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Jim Pierce
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Publications (1)
Proceedings Article | 21 August 2020 Presentation + Paper
Process repeatability in volume manufacturing of nanostructures utilizing nanoimprint lithography
Bradley Williams, Jim Pierce, Kevin Black, Michael Black, Daniel Bacon-Brown, Rumyana Petrova, Arash Farhang
Proceedings Volume 11467, 114670D (2020) https://doi.org/10.1117/12.2570679
KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Etching, Atomic force microscopy, Manufacturing, Critical dimension metrology, Optics manufacturing, Nanostructures, Thin films
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