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Jin Yin
at Shanghai Insistute of Optics and Fine Mechanics
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Publications (2)
SPIE Journal Paper | 14 July 2018 Open Access
In situ monitoring and controlling surface shape of the polishing pad in continuous polishing
Jin Yin, Xiang Jiao, Wenlong Tang, Jianqiang Zhu
OE, Vol. 57, Issue 07, 074103, (July 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.7.074103
KEYWORDS: Polishing, Surface finishing, Interferometers, Photovoltaics, Optical engineering, High power lasers, Automatic control, Spherical lenses, Calibration, Optical components
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Proceedings Article | 28 October 2016 Paper
A novel method about online monitoring surface shape of optical elements in continuous polishing
Proceedings Volume 9683, 96831L (2016) https://doi.org/10.1117/12.2242247
KEYWORDS: Surface finishing, Polishing, Optical components, Optics manufacturing, Photovoltaics, Lithium, Reflectors, Temperature metrology, Fused quartz, Glasses
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