Mr. Jinchao Liu Profile

Jinchao Liu

at Fraunhofer Institut fur Silicatforschung ISC

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Proceedings Article | 22 March 2021 Presentation + Paper

Novel dielectric elastomer sensors for the measurement of elevated pressure loads

Holger Böse, Jinchao Liu, Thomas Gerlach

Proceedings Volume 11587, 1158708 (2021) https://doi.org/10.1117/12.2584036

KEYWORDS: Sensors, Dielectrics, Capacitance, Silicon carbide, Silicon, Electrodes, Sensor performance, Particles, Manufacturing, Distance measurement

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A novel design for dielectric elastomer pressure sensors based on a capacitive measurement principle is introduced. Compared with easily compressible and highly sensitive dielectric elastomer sensors containing internal voids, the new sensors are compact and suitable for an elevated pressure range up to about 2 MPa. In these sensors, a dielectric elastomer film with several dielectric and electrode layers is covered on both surfaces by plates, which exhibit a pattern of openings. When the sensor film is compressed, the elastomer material can expand into these openings, which reduces the film thickness and increases the capacitance. The dielectric elastomer film consists of a soft silicone with carbon black particles in the electrode layers. With this design, the sensitivity of the pressure sensors in terms of the capacitance increase is enhanced in comparison with reference sensors without openings in the plates and the disturbing hysteresis of the capacitance vs. pressure curves is reduced. With FEM Multiphysics simulations, the capacitance enhancement upon pressure increase and the sensor deformation were calculated and compared with experimental data. In a systematic study, different parameters of the sensor design were varied, in order to evaluate their influence on the sensor performance. The results of this study are presented in the paper.

Proceedings Article | 22 June 2020 Presentation + Paper

Smart elastomer based liquid level sensors with capacitive and resistive measuring principles

Holger Böse, Jinchao Liu

Proceedings Volume 11375, 113750S (2020) https://doi.org/10.1117/12.2557854

KEYWORDS: Sensors, Liquids, Capacitance, Electrodes, Resistance, Dielectrics, Silicon, Particles, Carbon, Resistors

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Different capacitive and resistive elastomer sensors for the measurement of the filling level of water in a vertical plastic tube are introduced in the paper. The filling level sensors consist of elastomer membranes carrying electrically conductive layers with special geometrical designs. Three different basic sensor principles in various versions were investigated. First, capacitive strain sensors with different electrode designs detect the pressure of the water column above the elastomer membrane by measuring the change of electrical capacitance due to the stretch deformation. The shape of the electrode layers on these sensors affects their measuring sensitivity. Second, resistive strain sensors are also stretched by the water pressure acting on the membrane, but here the stretch changes the electrical resistance of the sensor. The resistor on the membrane is a silicone layer with conductive particles, which consist of carbon black or alternatively of silver-coated copper flakes. Depending on the kind and the concentration of the particles, the resistance of the sensor and its variation upon stretch can be tuned. Third, capacitive proximity sensors detect the height of the water level by measuring the capacitance between two neighbored electrode layers on the membrane. In this configuration, the sensor is a long elastomer film along the length of the plastic tube. The advantages and disadvantages of the different sensor principles are discussed. This discussion includes the sensor characteristics in terms of the change of capacitance or resistance vs. water level in the tube and also the creep behavior of the different filling level sensor types at constant water filling level.

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