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Jiushuai Xu
at Technische Univ. Braunschweig
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Publications (1)
Proceedings Article | 13 June 2017 Presentation + Paper
Gravimetric humidity sensor based on ZnO nanorods covered piezoresistive Si microcantilever
Jiushuai Xu, Maik Bertke, Xiaojing Li, Alaaeldin Gad, Hao Zhou, Hutomo Suryo Wasisto, Erwin Peiner
Proceedings Volume 10246, 102460C (2017) https://doi.org/10.1117/12.2264897
KEYWORDS: Nanorods, Crystals, Actuators, Lithium, Zinc, Scanning electron microscopy, Zinc oxide, Humidity, Sensors, Silicon, Microelectromechanical systems, Biological and chemical sensing, Biomedical optics, Fabrication, Bulk micromachining
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