Unspecified Joao Lopes-Barbosa Profile

Joao Lopes-Barbosa

at CEA-LETI

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Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Life cycle assessment of etching processes for FDSOI transistors technologies

Mickaël Renaud, Aurélien Sarrazin, Joao Lopes-Barbosa, Yannick Rivoira, Isabelle Servin, François Boulard

Proceedings Volume 12958, 129580K (2024) https://doi.org/10.1117/12.3009969

KEYWORDS: Etching, Plasma etching, Plasma, Climate change, Gases, Transistors, Power consumption, Front end of line, Sustainable technology, CMOS technology

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