Dr. Jung-hwan Kim Profile

Dr. Jung-hwan Kim

at SAMSUNG Electronics Co., Ltd.

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Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

Computational distortion prediction method considering characteristics of EUV lithography

Jong-hyun Hwang, Jae-il Lee, Hyeon-jun Ha, Jung-hwan Kim, Kwang-sun Song, Young-jin Park

Proceedings Volume 12953, 129530L (2024) https://doi.org/10.1117/12.3010639

KEYWORDS: Extreme ultraviolet, Distortion, Simulations, Overlay metrology, Semiconducting wafers, Deep ultraviolet, Optical lithography, Extreme ultraviolet lithography, Zernike polynomials, Projection systems

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