Dr. Junghun Chae Profile

Dr. Junghun Chae

at Univ of Illinois

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Publications (2)

Proceedings Article | 4 September 2008 Paper

Patterning of single-walled carbon nanotubes using a low-fluence excimer laser photoablation process

Junghun Chae, Xinning Ho, John Rogers, Kanti Jain

Proceedings Volume 7037, 70370M (2008) https://doi.org/10.1117/12.795072

KEYWORDS: Carbon nanotubes, Photoresist materials, Excimer lasers, Optical lithography, Laser processing, Laser ablation, Microelectronics, Single walled carbon nanotubes, Plasma, Optoelectronic devices

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Proceedings Article | 29 January 2008 Paper

Excimer laser projection photoablation and lift-off process for patterning of indium-tin-oxide for cost-effective fabrication of flat-panel displays

Junghun Chae, Sreeram Appasami, Kanti Jain

Proceedings Volume 6911, 69110P (2008) https://doi.org/10.1117/12.767827

KEYWORDS: Optical lithography, Polymers, Excimer lasers, Microelectronics, Photoresist materials, Etching, Plasma display panels, Laser systems engineering, Amorphous silicon, Silicon

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