KaiYuan Chi
at ASML
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 May 2022 Poster + Presentation + Paper
Wen Zhan Zhou, Kan Zhou, Yu Yang Bian, Yu Zhang, Ijen van Mil, Robbin Zhu, Jo Zhu, Ivan Mao, Kai yuan Chi, Xuechen Zhu, Kelvin Pao, Pei Wang, Lilla Wang, Abdalmohsen Elmalk, Gary Zhang
Proceedings Volume 12053, 120532A (2022) https://doi.org/10.1117/12.2638430
KEYWORDS: Metrology, Semiconducting wafers, Control systems, Optical proximity correction, Logic devices, Reticles, Stochastic processes, High volume manufacturing, Finite element methods, Error analysis

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