Kangfa Deng
at TU Dresden
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 2 April 2015 Paper
Proceedings Volume 9431, 943112 (2015) https://doi.org/10.1117/12.2084171
KEYWORDS: Sensors, Actuators, Prototyping, Transducers, Silicon, Temperature metrology, Particles, Chemical elements, Convection, Microsystems

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