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Kevin Gorman
at EMD Electronics
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Publications (1)
Proceedings Article | 9 April 2024 Presentation + Paper
Directed self-assembly: PS-b-PMMA materials readiness and high-chi platforms for extended geometry scaling
Jerome Wandell, Kevin Gorman, Boaz Alperson, Durairaj Baskaran, Md. Rahman, JiHoon Kim, Stefan Michlik, Youngjun Her, Shinji Miyazaki
Proceedings Volume 12956, 129560F (2024) https://doi.org/10.1117/12.3010505
KEYWORDS: Directed self assembly, Block copolymers, Extreme ultraviolet, Stochastic processes, Copolymers, Critical dimension metrology, Optical lithography, Molecular self-assembly, Process control, Polymerization
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