Prof. Kevin D. Murphy Profile

Prof. Kevin D. Murphy

at Univ of Connecticut

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Author

Publications (3)

Proceedings Article | 19 February 2008 Paper

Mechanics of the dynamic release process for stiction failed microcantilever beams using structural vibrations

Amit Savkar, Kevin Murphy

Proceedings Volume 6884, 68840A (2008) https://doi.org/10.1117/12.783835

KEYWORDS: Mechanics, Microelectromechanical systems, Reliability, Beam analyzers, Analytical research, Polymers, Coating, Deep reactive ion etching, Pulsed laser operation, Physics

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Proceedings Article | 6 January 2006 Paper

Using periodic electrical excitation to achieve stick-release in micro-cantilevers

Amit Savkar, Kevin Murphy

Proceedings Volume 6111, 611102 (2006) https://doi.org/10.1117/12.647841

KEYWORDS: Microelectromechanical systems, Reliability, Mathematical modeling, Physics, Mechanical engineering, Failure analysis, Interfaces, Hydrogen, Carbon, Manufacturing

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Proceedings Article | 22 January 2005 Paper

Dynamic excitation: a noninvasive technique for initiating stiction repair in MEMS

Amit Savkar, Kevin Murphy, Matthew Begley

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.590849

KEYWORDS: Microelectromechanical systems, Mechanics, Interfaces, Reliability, Adhesives, Modal analysis, Electrodynamics, Superposition, Structural dynamics, Mechanical engineering

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