We designed and fabricated an arrayed waveguide grating demultiplexer of 70 × 75 μm2 size, which consists of Si slab and wire waveguides on silicon-on-insulator substrate. By optimizing the connection between components and the layout of arrayed waveguides, the internal light scattering and the phase error were suppressed. As a result, the clear demultiplexing characteristics were observed with a channel spacing of 8 nm and a sidelobe level of -22 dB in the wavelength range around 1.55 μm.
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