Kristupas Tikuišis
at Valeo Autoklimatizace k.s.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 May 2012 Paper
Proceedings Volume 8428, 84280K (2012) https://doi.org/10.1117/12.921994
KEYWORDS: Microlens, Fabrication, Polymers, Scanning electron microscopy, Laser induced damage, Laser damage threshold, Surface roughness, Electron beam lithography, 3D microstructuring, Nanolithography

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