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Dr. Larry Zhuang
at IBM Thomas J Watson Research Ctr
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Publications (1)
Proceedings Article | 13 June 2022 Presentation
Feasibility study of machine learning modeling for full chip optical proximity correction
Yuping Cui, Jing Xue, Jing Sha, Zheng Guo Chen, Larry Zhuang, Derren Dunn, Jeffrery Shearer, Li-Jin Chen, Rich Wu, Charlie King
Proceedings Volume 12052, 120520R (2022) https://doi.org/10.1117/12.2614060
KEYWORDS: Optical proximity correction, Machine learning, Data modeling, Neural networks, Process modeling, Photomasks, Wafer-level optics, Semiconducting wafers, Lithography, Photoresist processing
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