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Lei Sun
at Synopsys Inc
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Publications (1)
Proceedings Article | 16 October 2017 Presentation + Paper
VSB fracture optimization for mask write time reduction
Lei Sun, Dan Hung, John Burns, Bill Moore
Proceedings Volume 10451, 1045105 (2017) https://doi.org/10.1117/12.2280465
KEYWORDS: Photomasks, Vestigial sideband modulation, Critical dimension metrology, Optimization (mathematics), Statistical analysis, Data corrections, Analytics
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