Mr. Lev Merkushov Profile

Lev Merkushov

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 23 March 2020 Paper

Experimental verification of sub-wavelength holographic lithigraphy (SWHL) concept

M. Borisov, D. Chelubeev, V. Chernik, L. Merkushov, V. Rakhovskiy, A. Shamaev

Proceedings Volume 11324, 113241J (2020) https://doi.org/10.1117/12.2552013

KEYWORDS: Photomasks, Holography, Photoresist materials, Lithography, Optical lithography, Image resolution, Holograms, 3D image reconstruction, Digital holography

Read Abstract +

Proceedings Article | 23 March 2020 Paper

Maskless holographic schemes based on phase micromirror SLMs

M. Borisov, D. Chelubeev, V. Chernik, L. Merkushov, V. Rakhovskiy, A. Shamaev

Proceedings Volume 11324, 113241K (2020) https://doi.org/10.1117/12.2552074

KEYWORDS: Digital holography, Maskless lithography, Spatial light modulators, Photomasks, 3D image reconstruction, Micromirrors, Lithography

Read Abstract +

Proceedings Article | 23 March 2020 Paper

Mathematical problems of holographic mask synthesis

M. Borisov, D. Chelubeev, V. Chernik, L. Merkushov, V. Rakhovskiy, A. Shamaev

Proceedings Volume 11324, 113241I (2020) https://doi.org/10.1117/12.2551942

KEYWORDS: Photomasks, Holography, Holograms, Image quality, Lithography, Diffraction, Algorithm development, Software development, 3D image reconstruction, Phase shifts, Digital holography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years