In deep ultraviolet region that typical applications are used on the ArF wavelength, coated optics should meet stringent requirements of optical systems. To meet these requirements, systematical researches are carried out on fabrication and characterization methods of fluoride coatings. First, by optimizing of deposition processes, dense coatings with the refractive index of ~1.7 for LaF3 and ~1.4 for MgF2, together with extinction coefficients of ~2×10-4 on 193nm were realized. The transmission of AR coating for 193nm achieved by using optimized deposition techniques is 99.8%. Second, a method of designing shadowing masks was developed to solve the problem of correcting coating thickness distributions for complex DUV systems. By using the method, the thickness distribution error specification of 3% PV has been achieved on substrates with ~300mm diameters and large curvatures. Finally, the laser calorimetry method is used to evaluate the laser radiation stability of fluoride coatings. It is turned out that the damage coefficients of fluoride coatings, which are defined as the values of unrecoverable increase of the absorption during the laser irradiation process, are much lower than that of fused silica substrates. The above progresses could further support the realization of high performance DUV optical systems.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.