Dr. Lihong Liu Profile

Dr. Lihong Liu

at Institute of Microelectronics, CAS

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Publications (2)

Proceedings Article | 1 May 2023 Poster + Paper

Application of double exposure technique in plasmonic lithography

Huwen Ding, Lihong Liu, Lisong Dong, Zhishu Chen, Yayi Wei

Proceedings Volume 12497, 124970S (2023) https://doi.org/10.1117/12.2657812

KEYWORDS: Lithography, Surface plasmons, Photomasks, Light sources and illumination, Polarized light, Double patterning technology, Metals, Interfaces

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Proceedings Article | 25 May 2022 Poster + Paper

Imaging quality evaluation of superlens based nanolithography

Lihong Liu, Huwen Ding, Lisong Dong, Libin Zhang, Yayi Wei

Proceedings Volume 12054, 120540C (2022) https://doi.org/10.1117/12.2628122

KEYWORDS: Dielectrics, Silver, Photoresist materials, 3D modeling, Polymethylmethacrylate, Nanolithography, Photomasks, Chromium, Metals

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