Mr. Liyu Lin Profile

Liyu Lin

at Tsinghua Univ Shenzhen International Graduate School

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Author

Publications (2)

Proceedings Article | 8 July 2022 Paper

Modulation of dielectric film on two-axis Lloyd’s mirrors for patterning high-uniformity nanoscale grating

Gaopeng Xue, Liyu Lin, Qihang Zhai, Qian Zhou, Xiaohao Wang, Xinghui Li

Proceedings Volume 12283, 1228309 (2022) https://doi.org/10.1117/12.2616432

KEYWORDS: Dielectric polarization, Mirrors, Modulation, Dielectrics, Reflection, Aluminum, Optical lithography, 3D modeling, Interferometers, Reflectivity

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Proceedings Article | 9 October 2021 Presentation + Paper

A mechanical mosaic method for reflective grating based on diffracted beams orientation

Qihang Zhai, Gaopeng Xue, Liyu Lin, Qian Zhou, Kai Ni, Xiaohao Wang, Xinghui Li

Proceedings Volume 11898, 1189819 (2021) https://doi.org/10.1117/12.2602229

KEYWORDS: Optical encoders, Diffraction gratings, Mirrors, Manufacturing, Lithography, Interferometers, Wafer-level optics, Reflectivity, Projection lithography

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