Dr. Long Cheng Profile

Dr. Long Cheng

at Institute of Automation

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 2 April 2007 Paper

Liyuan Wang, Zhanxing Chu, Long Cheng

Proceedings Volume 6519, 65192I (2007) https://doi.org/10.1117/12.711701

KEYWORDS: Polymers, Photoresist materials, Polymer thin films, Lithography, Absorption, Quartz, Mercury, FT-IR spectroscopy, Lamps, Polymerization

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Keywords/Phrases