Dr. Luca Mezi Profile

Dr. Luca Mezi

at ENEA

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Publications (2)

Proceedings Article | 13 April 2020 Presentation + Paper

Accurate and low-cost ENEA solar compass for precision metrology of true azimuth: instrumental and smart versions

S. Bollanti, F. Andreoli, L. Cafarella, D. De Meis, P. Di Lazzaro, D. Di Mauro, F. Flora, G. P. Gallerano, L. Mezi, D. Murra, L. Murra, D. Vicca, G. Vicoli, A. Zirizzotti

Proceedings Volume 11352, 1135216 (2020) https://doi.org/10.1117/12.2555747

KEYWORDS: Sun, Sensors, Magnetism, Global Positioning System, Calibration

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Proceedings Article | 3 January 2019 Paper

The ENEA discharge produced plasma extreme ultraviolet source and its patterning applications

L. Mezi, S. Bollanti, S. Botti, G. Brusatin, L. Businaro, G. Della Giustina, P. Di Lazzaro, M. Fagnoni, F. Flora, A. Gerardino, D. Murra, S. Protti, A. Torre, E. Torti

Proceedings Volume 11042, 110420Z (2019) https://doi.org/10.1117/12.2522469

KEYWORDS: Extreme ultraviolet, Plasma, Graphene, Photomasks, Optical lithography, Extreme ultraviolet lithography, Spatial resolution, Silicon, Photoresist materials, Lithography

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