Dr. Lun Shi Profile

Dr. Lun Shi

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Publications (1)

Proceedings Article | 17 January 2003 Paper

Phase scanning in ruling engine for the fabrication of subnanometer varied line-space diffraction gratings

Lun Shi

Proceedings Volume 4984, (2003) https://doi.org/10.1117/12.477835

KEYWORDS: Diffraction gratings, Sensors, Interferometers, Diffraction, Photography, Atomic force microscopy, Physics, Signal detection, Mechanics, Control systems

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