Dr. Luuk Heijmans Profile

Dr. Luuk Heijmans

at ASML Netherlands BV

SPIE Involvement:

Author

Publications (2)

SPIE Journal Paper | 19 February 2021 Open Access

Mark van de Kerkhof, Andrei Yakunin, Vladimir Kvon, Selwyn Cats, Luuk Heijmans, Manis Chaudhuri, Dmitry Asthakov

JM3, Vol. 20, Issue 01, 013801, (February 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.1.013801

KEYWORDS: Reticles, Plasma, Particles, Electrons, Extreme ultraviolet, Ions, Scanners, Extreme ultraviolet lithography, Protactinium, Electrodes

Proceedings Article | 23 March 2020 Paper

Mark van de Kerkhof, Andrei Yakunin, Vladimir Kvon, Ferdi van de Wetering, Selwyn Cats, Luuk Heijmans, Andrey Nikipelov, Adam Lassise, Vadim Banine

Proceedings Volume 11323, 113230Y (2020) https://doi.org/10.1117/12.2551020

KEYWORDS: Plasma, Particles, Ions, Extreme ultraviolet, Scanners, Hydrogen, Reticles, Particle contamination

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