In the lithography machine, there is a field diaphragm, which is a kind of edge structure. In the process of exposure, it is linearly synchronous movement with the die, so when developing the slit, it is necessary to measure its movement characteristics precisely. A method of velocity measurement based on machine vision is adopted, by detecting edge position in sequential images, and then through the transformation between image coordinate and world coordinate, the object displacement in real space is calculated and finally instantaneous velocity of the object is got. Firstly, through the simulation model in CODE V, correctness of the measurement principle is verified, Next, some error sources that affect the precision of the machine vision measurement system are analyzed, and corresponding solutions are given.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.