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Massimo D. Sardo
at STMicroelectronics
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Publications (1)
Proceedings Article | 5 April 2007 Paper
In-line AFM characterization of STI profile at the 65 nm node with advanced carbon probes
Massimo Sardo, Audrey Berthoud, Jean-Claude Royer, Christian Kusch
Proceedings Volume 6518, 65181B (2007) https://doi.org/10.1117/12.702978
KEYWORDS: Atomic force microscopy, Carbon, Oxides, Transmission electron microscopy, Silicon, Logic, Image processing, Manufacturing, Statistical analysis, Semiconducting wafers
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