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Mei Zhang
at Beijing Institute of Technology
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Publications (1)
Proceedings Article | 19 December 2013 Paper
The application of variable universe fuzzy PID controller in computer-aided alignment of lithography projector
Mei Zhang, Meng Zheng, Yanqiu Li
Proceedings Volume 9046, 90460H (2013) https://doi.org/10.1117/12.2037648
KEYWORDS: Projection systems, Control systems, Fuzzy logic, Optical alignment, Lithography, Image quality, Extreme ultraviolet lithography, Ceramics, Lithium, Monochromatic aberrations
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