Dr. Michael Kraft Profile

Dr. Michael Kraft

Professor at Univ Duisburg-Essen

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 21 May 2015 Paper

Investigation of diaphragm deflection of an absolute MEMS capacitive polysilicon pressure sensor

C. Walk, A. Goehlich, A. Giese, M. Goertz, H. Vogt, M. Kraft

Proceedings Volume 9517, 95170T (2015) https://doi.org/10.1117/12.2176188

KEYWORDS: Sensors, Semiconducting wafers, Oxides, Data modeling, Microelectromechanical systems, Silicon, Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition, Capacitance, CMOS sensors

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Proceedings Article | 26 May 2011 Paper

Ion source development and radiobiology applications within the LIBRA project

M. Borghesi, S. Kar, R. Prasad, F. K. Kakolee, K. Quinn, H. Ahmed, G. Sarri, B. Ramakrishna, B. Qiao, M. Geissler, S. Ter-Avetisyan, M. Zepf, G. Schettino, B. Stevens, M. Tolley, A. Ward, J. Green, P. Foster, C. Spindloe, P. Gallegos, A.. Robinson, D. Neely, D. Carroll, O. Tresca, X. Yuan, M. Quinn, P. McKenna, N. Dover, C. Palmer, J. Schreiber, Z. Najmudin, I. Sari, M. Kraft, M. Merchant, J. C. Jeynes, K. Kirkby, F. Fiorini, D. Kirby, S. Green

Proceedings Volume 8079, 80791E (2011) https://doi.org/10.1117/12.888262

KEYWORDS: Ions, Laser applications, Ion lasers, Laser development, Electrons, Fusion energy, Ion beams, Particles, Cancer, Carbon

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Proceedings Article | 2 October 2001 Paper

Analysis and design of a capacitive accelerometer based on a electrostatically levitated microdisk

Ruth Houlihan, Alena Kukharenka, Mircea Gindila, Michael Kraft

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.443012

KEYWORDS: Electrodes, Capacitance, Control systems, Modulators, Capacitors, Nickel, Simulink, Systems modeling, Microelectromechanical systems, Chemical elements

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