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Michael Morgan
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Publications (2)
Proceedings Article | 1 December 2022 Poster + Paper
A study of rare contamination defects come in a vacuum chamber
Proceedings Volume 12293, 122930T (2022) https://doi.org/10.1117/12.2627280
KEYWORDS: Thin films, Plasma, Chlorine, Particles, Contamination, Electrodes, Aluminum, Scanning electron microscopy, Inspection, Etching
Proceedings Article | 18 October 2017 Paper
Advanced photomask chrome etch: selectivity without sacrifice
Michael Morgan, Chris Johnson, Kristen Bevlin, Dwarakanath Geerpuram, Russ Westerman
Proceedings Volume 10451, 1045115 (2017) https://doi.org/10.1117/12.2281439
KEYWORDS: Etching, Chromium, Photomasks, Plasmas, Process control, Diffractive optical elements, Ultraviolet radiation, Particles, Extreme ultraviolet, Ions
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