In this paper we study the properties of polycrystalline yttrium iron garnet Y3Fe5O12 (YIG) thin films deposited by means of a Pulsed Laser Deposition technique (PLD). The films were grown at a substrate temperature of 700-800°C and at various oxygen pressures. Annealing was performed for all the samples and the role of ambient gas as well as of temperature was investigated. The influence of structure and of phase purity was also studied through X-Ray Diffraction (XRD). In addition, compositional analysis was carried out via Rutherford Back Scattering (RBS). Finally, optical transmittance was tested for both amorphous and polycrystalline structures in view of their potential use in the fabrication of magneto-optic integrated devices.
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