CONFERENCE PROCEEDINGS
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Michio Ohashi
at Nikon Corp
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Author
Publications (2)
Proceedings Article | 14 September 2023 Paper
Singlet metalenses with wide field-of-view of 170 deg. and the ghost noise
H. Toba, D. Mori, K. Otaki, H. Takagi, M. Ohashi, H. Konishi, S. Yoshikawa, Y. Takigawa
Proceedings Volume 12798, 1279804 (2023) https://doi.org/10.1117/12.2691602
KEYWORDS: Metalenses, Diffraction, Design and modelling, Optical filters, Diffractive optical elements, Transmittance, Fisheye lenses, Fabrication
Proceedings Article | 26 May 2022 Poster + Paper
Image-based alignment sensor unaffected by aberration
Proceedings Volume 12053, 120531K (2022) https://doi.org/10.1117/12.2610608
KEYWORDS: Sensors, Image sensors, Optical alignment, Semiconducting wafers, Overlay metrology, Wavefront aberrations, CCD image sensors, Superposition, Optical sensors, Diffraction
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