Dr. Mikhail Haurylau Profile

Dr. Mikhail Haurylau

Director, Systems Engineering at Onto Innovation Inc

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Publications (3)

Proceedings Article | 9 February 2007 Paper

Hybrid photonic crystal microcavity switches on SOI

Sean Anderson, Mikhail Haurylau, Jidong Zhang, Philippe Fauchet

Proceedings Volume 6477, 647712 (2007) https://doi.org/10.1117/12.707905

KEYWORDS: Optical microcavities, Photonic crystals, Silicon, Electro optics, Liquid crystals, Oxides, Plasma etching, Plasma, Polymethylmethacrylate, Etching

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Proceedings Article | 13 September 2005 Paper

Electrical tuning of the silicon-based 2-D photonic bandgap structures

Mikhail Haurylau, Sean Anderson, Kenneth Marshall, Philippe Fauchet

Proceedings Volume 5926, 592603 (2005) https://doi.org/10.1117/12.621502

KEYWORDS: Silicon, Liquid crystals, Switching, Silicon photonics, Electrodes, Etching, Aluminum, Semiconducting wafers, Optical interconnects, Birefringence

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Proceedings Article | 14 October 2004 Paper

Dynamically tunable 1D and 2D photonic bandgap structures for optical interconnect applications

Mikhail Haurylau, Sharon Weiss, Philippe Fauchet

Proceedings Volume 5511, (2004) https://doi.org/10.1117/12.561114

KEYWORDS: Silicon, Liquid crystals, Optical interconnects, Picosecond phenomena, Optical microcavities, Refractive index, Semiconducting wafers, Etching, Geometrical optics, Mirrors

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