Mr. Mikio Oka Profile

Mikio Oka

at Sony Atsugi Technology Ctr

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Publications (3)

Proceedings Article | 15 May 2007 Paper

New OPC method for contact layer to expand process margin

Mikio Oka, Hidetoshi Oishi, Kensuke Tsuchiya, Hidetoshi Ohnuma

Proceedings Volume 6607, 660732 (2007) https://doi.org/10.1117/12.729021

KEYWORDS: Optical proximity correction, Critical dimension metrology, Image processing, Lithography, Semiconductors, Optical calibration, Photomasks, Resolution enhancement technologies, Photoresist processing

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Proceedings Article | 14 May 2007 Paper

New method to estimate systematic yield caused by lithography manufacturability

Hidetoshi Oishi, Mikio Oka, Kensuke Tsuchiya, Kazuhisa Ogawa, Hidetoshi Ohnuma

Proceedings Volume 6607, 660719 (2007) https://doi.org/10.1117/12.728957

KEYWORDS: Optical proximity correction, Metals, Design for manufacturing, Lithography, Manufacturing, Failure analysis, Yield improvement, Image processing, Error analysis, Photomasks

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Proceedings Article | 20 May 2006 Paper

Robust OPC technique using aerial image parameter

Mikio Oka, Shinichiro Suzuki, Kazuyoshi Kawahara, Kensuke Tsuchiya, Kazuhisa Ogawa, Hidetoshi Ohnuma

Proceedings Volume 6283, 628333 (2006) https://doi.org/10.1117/12.681821

KEYWORDS: Optical proximity correction, SRAF, Image processing, Lithography, Resolution enhancement technologies, Model-based design, Scanning electron microscopy, Photomasks, Printing, Semiconductors

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